Technologies for the fabrication of cylindrical fine line devices
- Autori: Lullo G.; Arnone C.; Giaconia G.C.
- Anno di pubblicazione: 1997
- Tipologia: Articolo in rivista
- OA Link: http://hdl.handle.net/10447/427584
Abstract
A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.